Product Introduction

Flat Panel Display Production related Equipment

Plasma Cleaner

Cleaner that uses plasma to irradiate radicals to remove organic matter and improve wettability. High frequency and microwave are not used.

Features and Intended Use

Since the chemical reaction only by radicals, it does not damage the substrate.

An example of specifications

Items Specifications
Model DTS-01
Dimensions 1130 x 1130 x 1700(mm)
Internal chamber size 550 x 600 x 200(mm)
Reaction gas Nitrogen, oxygen, argon and air
Control Method with Sequencer
Processing Time 1 second to 30 minutes (set in seconds)
Chamber material Aluminum grinding
Power supply 3φ AC200V 20A 50Hz/60Hz


* Specifications are different depend on the substrate size. Please feel free contact us for the details.