Cleaner that uses plasma to irradiate radicals to remove organic matter and improve wettability. High frequency and microwave are not used.
Features and Intended Use
Since the chemical reaction only by radicals, it does not damage the substrate.
An example of specifications
|Dimensions||1130 x 1130 x 1700(mm)|
|Internal chamber size||550 x 600 x 200(mm)|
|Reaction gas||Nitrogen, oxygen, argon and air|
|Control Method||with Sequencer|
|Processing Time||1 second to 30 minutes (set in seconds)|
|Chamber material||Aluminum grinding|
|Power supply||3φ AC200V 20A 50Hz/60Hz|
* Specifications are different depend on the substrate size. Please feel free contact us for the details.